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发明名称
SPINNER SYSTEM HAVING SENSOR FOR DETECTING NO-PATTERN
摘要
申请公布号
KR20060080634(A)
申请公布日期
2006.07.10
申请号
KR20050000919
申请日期
2005.01.05
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, BYOUNG SEONG
分类号
H01L21/66;H01L21/027
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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