发明名称 DEVICE FOR THE VAPORISATION OF CONDENSED MATERIALS
摘要 The invention relates to a device for the vaporisation of condensed (solid or liquid) materials, in particular, of starting materials for OLED production, comprising a container (1), for housing the material with a gas supply line (2) and a gas exhaust line (3). A number of inserts (4) for housing the material are arranged in the container (1) which have an individual flow thereover, whereby the inserts (4) are arranged one over the other in the vertical direction and comprise recesses (5) for housing the material in the horizontal direction over which a flow is possible. Several gas flows may flow in parallel over several inserts.
申请公布号 WO2006069921(A2) 申请公布日期 2006.07.06
申请号 WO2005EP56841 申请日期 2005.12.16
申请人 AIXTRON AG;REINHOLD, MARKUS;STRAUCH, GERHARD KARL;GERSDORFF, MARKUS;MEYER, NICO;KITTEL, FLORENZ 发明人 REINHOLD, MARKUS;STRAUCH, GERHARD KARL;GERSDORFF, MARKUS;MEYER, NICO;KITTEL, FLORENZ
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
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