APPARATUS FOR MOUNTING TWO OR MORE OPTICAL ELEMENTS AND METHOD FOR PROCESSING THE SURFACE OF AN OPTICAL ELEMENT

摘要

In an apparatus for mounting two or more optical elements that are each held in an individual mount or in a support structure, said optical elements are mounted in a common mount. The relative positioning of the optical elements (10, 11) in the common mount (18) can be set. The use of the invention is a microlithography projection objective is disclosed. Additionally, an interactive method is disclosed which entails the in situ testing of an optical component surface of an imaging device, such as a microlithography projection objective, removal of the component for further processing, and reinstallation of the component.