发明名称 FINE PARTICULATE GROUP DENSITY RAISING METHOD AND DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method and a device of supplying a fine particle group by increasing the density thereof, when supplying the fine particles by air. <P>SOLUTION: A density of a target to be a laser-generated plasma light source is effectively raised to enable to raise absorbing efficiency. With this, a high-density state can be obtained which is yet to be attained by an air carrier system utilizing laser ablation. At the same time, a highly efficient plasma light source can be generated. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006179353(A) 申请公布日期 2006.07.06
申请号 JP20040372327 申请日期 2004.12.22
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY 发明人 YASHIRO HIDEHIKO;TOMIE TOSHIHISA
分类号 H05G2/00;G03F7/20;G21K5/08;H01L21/027 主分类号 H05G2/00
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