发明名称 |
FINE PARTICULATE GROUP DENSITY RAISING METHOD AND DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a device of supplying a fine particle group by increasing the density thereof, when supplying the fine particles by air. <P>SOLUTION: A density of a target to be a laser-generated plasma light source is effectively raised to enable to raise absorbing efficiency. With this, a high-density state can be obtained which is yet to be attained by an air carrier system utilizing laser ablation. At the same time, a highly efficient plasma light source can be generated. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
申请公布号 |
JP2006179353(A) |
申请公布日期 |
2006.07.06 |
申请号 |
JP20040372327 |
申请日期 |
2004.12.22 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY |
发明人 |
YASHIRO HIDEHIKO;TOMIE TOSHIHISA |
分类号 |
H05G2/00;G03F7/20;G21K5/08;H01L21/027 |
主分类号 |
H05G2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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