| 摘要 |
<P>PROBLEM TO BE SOLVED: To adjust the sensitivity easily in an acceleration sensor, particularly, an acceleration sensor manufactured by a micromachining process, and to provide an acceleration sensor allowing to easily decide the quality, with respect to faulty formation of a formed acceleration sensor and its manufacturing method. <P>SOLUTION: The acceleration sensor comprises a base section, a beam section connected to the base section, a weight section connected to the beam section, and a protrusion section, provided immediately under the beam section for supporting the beam section. The protrusion section comprises a first protrusion part for supporting the beam section and a second protrusion part adjacent to the first protrusion part. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
