发明名称 |
Gan-based permeable base transistor and method of fabrication |
摘要 |
An etched grooved GaN-based permeable-base transistor structure is disclosed, along with a method for fabrication of same.
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申请公布号 |
US2006148156(A1) |
申请公布日期 |
2006.07.06 |
申请号 |
US20050532456 |
申请日期 |
2005.04.22 |
申请人 |
BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC. |
发明人 |
GUNTER LIBERTY L.;CHU KANIN;EDDY CHARLES R.JR.;MOUSTAKAS THEODORE D.;BELLOTTI ENRICO |
分类号 |
H01L21/8238;H01L21/20;H01L21/425;H01L27/06;H01L29/20;H01L29/772 |
主分类号 |
H01L21/8238 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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