Linear wave guide type surface plasmon resonance microsensor

摘要

An improved linear wave guide type surface plasmon resonance (SPR) microsensor, particularly a microsensor employing a dual-opening multi-channel design, adopts a cross differential comparison to enhance the performance of the microsensor and uses a surface plated metal thin film to provide a wavelength absorption according to a SPR characteristic and match with an appropriate sized micro-channel to give a highly sensitive high-flux measurement. The invention applied in a water solution sample comprises: a substrate; a bottom layer contacting a surface of the substrate; at least one wave guide layer contacting the bottom layer and the other surface of the substrate; at least two SPR sensing areas on a surface opposite to the contact surface of the wave guide layer and the bottom layer; at least two SPR sensing film layers on a surface opposite to the contact surface of the two PRS sensing areas and the wave guide layer.