N-Sulfonyloxyimid-derivate und sie enthaltende strahlungsempfindliche Harzzusammensetzungen,申请号DE2000618350T-传众专利搜索

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发明名称	N-Sulfonyloxyimid-derivate und sie enthaltende strahlungsempfindliche Harzzusammensetzungen
摘要
申请公布号	DE60018350(T2)	申请公布日期	2006.07.06
申请号	DE2000618350T	申请日期	2000.11.08
申请人	JSR CORP., TOKIO/TOKYO	发明人	WANG, YONG;KOBAYASHI, EIICHI;MIYAJI, MASAAKI;NUMATA, JUN;SHIMOKAWA, TSUTOMU
分类号	C07D209/48;G03F7/028;C07D207/46;C07D209/76;G03F7/004;G03F7/038;G03F7/039	主分类号	C07D209/48
代理机构		代理人
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