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发明名称
TORQUE CONTROL METHOD OF BATH LIFTER
摘要
申请公布号
KR20060075875(A)
申请公布日期
2006.07.04
申请号
KR20040115244
申请日期
2004.12.29
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
CHOI, CHANG YONG
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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