发明名称 |
Method of improving the top plate electrode stress inducting voids for 1T-RAM process |
摘要 |
A method for fabricating a capacitor with overlying transistor without stress-induced voids is described. A capacitor stack is provided overlying a substrate. A stress-balancing dielectric layer is deposited overlying the stack. An anti-reflective coating (ARC) layer is deposited overlying the stress-balancing layer. The stack is patterned to form the capacitors. Gate transistors are formed overlying the capacitors wherein the stress-balancing layer prevents formation of stress-induced voids during the thermal processes involved in forming the gate transistors.
|
申请公布号 |
US7071509(B2) |
申请公布日期 |
2006.07.04 |
申请号 |
US20050040039 |
申请日期 |
2005.01.21 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
TU KUO-CHI |
分类号 |
H01L27/108;H01L21/02;H01L21/027;H01L21/8242;H01L21/8244;H01L27/11;H01L29/76;H01L29/94;H01L31/119 |
主分类号 |
H01L27/108 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|