TOP RING FOR CHEMICAL MECHANICAL POLISHING APPARATUS,申请号KR20040114347-传众专利搜索

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发明名称	TOP RING FOR CHEMICAL MECHANICAL POLISHING APPARATUS
摘要
申请公布号	KR20060075542(A)	申请公布日期	2006.07.04
申请号	KR20040114347	申请日期	2004.12.28
申请人	DONGBU ELECTRONICS CO., LTD.	发明人	NAM, JUNG HYUN
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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