| 摘要 |
PROBLEM TO BE SOLVED: To provide load port equipment that can make adequate performance and cost on the basis of lifting precision, and its mapping device. SOLUTION: There are arranged at the front of a load port frame 1 composing load port equipment, a lid detachable unit A, a first lifting unit U<SB>1</SB>for moving the lid detachable unit up and down, and a mapping frame 43 supporting a mapping device in a cantilevered way, while a second lifting unit U2 for moving the mapping device B up and down is arranged at the back surface part of the load port frame 1 to structure the two units A and B such that they are moved up and down by each of the first and second lifting units U<SB>1</SB>and U<SB>2</SB>independently, thus moving the lid detachable unit up and down by air cylinders 9 and 11 and moving the mapping device B up and down by a stepping motor 38. COPYRIGHT: (C)2006,JPO&NCIPI
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