| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an optical filter that can reduce differences between characteristics before and after a multi-layered film is peeled from a substrate. SOLUTION: An AL film 2 is formed on a quartz substrate 1 whose coefficient of linear expansion is 5.5×10<SP>-7</SP>/°C, the multi-layered film 3 is formed on the AL film 2 and then the multi-layered film 3 formed on the AL film 2 is peeled from the quartz substrate 1. COPYRIGHT: (C)2006,JPO&NCIPI
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