发明名称 ARRANGEMENT METHOD AND DEVICE OF MINUTE PARTICLES
摘要 PROBLEM TO BE SOLVED: To provide a method which does not receive the influence of the minute particles remaining on a mask while being capable of certainly filling up the pattern of the mask with the minute particles, such as a solder ball. SOLUTION: A ball mounter 1 performs a step S8 for moving a lot of solder balls by a head for filling, and a step S9 for removing the solder balls remaining in the mask by the head for removal. In the step S8, since remaining balls may be generated, sufficient quantity of solder balls can be moved. Further, in the step S9, remaining balls are removed, and the solder balls with which the opening pattern of the mask is filled up can be pressed and closely attached to flux. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006173195(A) 申请公布日期 2006.06.29
申请号 JP20040360268 申请日期 2004.12.13
申请人 ATHLETE FA KK 发明人 NEHASHI TORU;KAWAKAMI SHIGEAKI
分类号 H01L21/60 主分类号 H01L21/60
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