| 摘要 |
PROBLEM TO BE SOLVED: To provide a tool for maintenance capable of easily removing a seal ring fitted on a table base of a chuck table. SOLUTION: This is the tool for maintenance to remove from the table base the seal ring of the chuck table furnished with the table base, a workpiece holding member supported on the table base and to hold the workpiece, the seal ring fitted on an outer periphery of the table base and an elastic body seal an inner periphery of which is installed in an engaging groove formed on an outer peripheral surface of the seal ring, and it is furnished with a base member, an engaging means installed on the base member and to be engaged with an engaging groove formed on an outer periphery of the seal ring and a pressurizing means arranged on a center of the base member free to advance and retreat and to relatively move the base member and the seal ring by pressurizing an upper surface of the table base. COPYRIGHT: (C)2006,JPO&NCIPI |
