发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To improve the operation characteristics of both of an n-channel transistor and a p-channel transistor by simultaneously applying different stresses to their channel portions respectively without increasing the device area. SOLUTION: There are a formation region for the n-channel transistor Qn and a formation region for the p-channel transistor Qp which are partitioned by a device isolation region IS and arranged, and the stress in the formation region for the n-channel transistor Qn caused by contact plugs CP therein and the stress in the formation region for the p-channel transistor Qp caused by contact plugs CP therein are different from each other. In this configuration, the both driving currents in the n-channel transistor Qn and the p-channel transistor Qp can be increased without changing the sizes of the active regions A and the device isolation region IS. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006173468(A) 申请公布日期 2006.06.29
申请号 JP20040366215 申请日期 2004.12.17
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 YAMADA MASARU;MORITA KIYOYUKI;TSUTSUI MASASHI
分类号 H01L27/092;H01L21/8238;H01L27/10 主分类号 H01L27/092
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