发明名称 PHOTOSENSITIVE RESIN COMPOSITION, THIN FILM DISPLAY PANEL, AND METHOD FOR MANUFACTURING THIN FILM DISPLAY PANEL
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition that notably reduces unevenness and is formed in a uniform film thickness, a thin film display panel that includes a pattern comprising the photosensitive resin composition, and a method for manufacturing the thin film display panel. <P>SOLUTION: The thin film display panel includes a substrate, a thin film pattern formed on the substrate, and an insulating film formed on the thin film pattern and comprising the photosensitive resin composition that includes an alkali-soluble resin, a quinone diazido compound, a surfactant and a solvent, wherein the solvent includes a diethylene glycol dialkyl ether that includes an alkyl group including 1-5 carbon atoms, an ethyl 3-ethoxy propionate, an alkyl acetate that includes an alkyl group including 3-8 carbon atoms, and an alkyl lactate that includes an alkyl group including 1-6 carbon atoms. The method for manufacturing the thin film display panel is also provided. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006171670(A) 申请公布日期 2006.06.29
申请号 JP20050086323 申请日期 2005.03.24
申请人 SAMSUNG ELECTRONICS CO LTD;SUMITOMO CHEMICAL CO LTD 发明人 LEE HI-KUK;KIM KYU-YOUNG;RI TOKI;YAKO YOSHIKO
分类号 G03F7/004;G02B5/20;G02F1/1333;G03F7/022;H01L51/50;H05B33/22 主分类号 G03F7/004
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