| 摘要 |
Semi-integrated external cavity diode laser (ECDL) designs including integrated structures comprising a gain section, modulator section, and optional phase control section. Each integrated structure includes a waveguide that passes through each of the sections, with the waveguide further including an in-waveguide mirror. The in-waveguide mirror defines one end of an "effective" laser cavity, with the other end defined by a reflective element disposed generally opposite a rear facet of the integrated structure, forming an external cavity therebetween. The in-waveguide mirror is formed by using a focused ion beam (FIB) cut through the waveguide, or by etching one or more trenches through the waveguide and backfilling the trenches using a re-grown crystal or amorphous material deposition process. A tunable filter is disposed in the external cavity to effectuate tuning of the laser. The modulation section of the integrated structure enables high-speed modulation of an optical signal at a selected communication channel without requiring an external modulator.
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