Method for the production of double capacitor involves internal capacitor and external capacitor in single trench such that inner and outer capacitors are formed between their electrode contact and earth electrode

摘要

The method involves an internal capacitor (3) and an external capacitor (4) in a single trench (2), whereby an earth electrode (14) is separated so that the internal capacitor is formed between the internal electrode contact (5) and the earth electrode, and the external capacitor is formed between the external electrode contact (6) and the earth electrode. An internal electrode contact and an external electrode contact are provided whereby a first barrier layer (7) electrically separates the electrode contacts. The first etch stop layer is separated. The trench is developed in the separated first etch stop layer over the internal electrode contact, so that the internal electrode contact lies open. A second etch stop layer is arranged at the walls of the trench. The first etch stop layer is removed and the first barrier layer is partially removed, so that the external electrode contact also lies open. An electrode material (10) is arranged at the vertical area of the resulting structure, so that the internal electrodes contact and the electrode material are arranged at an inner wall of the second etch stop layer and at an external wall of the second etch stop layer contacts the internal electrode contact electrically. An independent claim is also included for the double capacitor.