CHARGED PARTICLE BEAM EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide charged particle beam equipment that does not cause positional misalignment at sample placement. SOLUTION: This equipment comprises a sample hold table on a pedestal and a sample exchange room equipped with a means for loading samples including wafers onto the sample hold table or unloading them from that table. When the above-mentioned samples are loaded onto the sample hold table, air in an interfce is removed between the sample and the sample hold table is removed. COPYRIGHT: (C)2006,JPO&NCIPI