| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet recording head which permits simultaneous formation of a filter capable of preventing refuse, foreign matter or the like from intruding into nozzles or the like at the same time as an ink supply section, is inexpensive and provides a good yield, and a manufacturing method therefor. SOLUTION: A filter composed of an etching resistant mask and a protective film to protect the etching resistant mask provided on the reverse side of a silicon substrate is formed at the same time as the etching when the ink supply section is formed in a silicon substrate by anisotropic etching to prevent refuse or foreign matter from intruding into ink discharge openings. COPYRIGHT: (C)2006,JPO&NCIPI
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