| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology enabling satisfactory film forming with the use of a liquid process, regardless of the relation between properties of a film-forming face and those of a fluid material. SOLUTION: A method of forming a film, using a fluid material containing a solute to be a thin film and a solvent to dissolve it, includes a first process of raising temperature of at least the vicinity of a film-forming face of an object (10) to be higher than the boiling point of the fluid material (12); a second process of dropping the fluid material on the film-forming face of the object; and a third process of raising temperature of the fluid material up to the boiling point at the time, when the fluid material reaches the film-forming face of the object, and making the solvent evaporate. COPYRIGHT: (C)2006,JPO&NCIPI
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