发明名称 CMOS image sensor and method for fabricating the same
摘要 A CMOS image sensor and a method for fabricating the same forms a trench-shaped transfer gate that serves to better transfer electrons generated by light incident on photodiodes, thus obtaining improved transfer characteristics. The CMOS image sensor includes a semiconductor substrate having at least one active region defined by a shallow trench isolation region; a light-receiving region formed in a surface of the semiconductor substrate; and a transfer gate buried in the semiconductor substrate between the light-receiving region and the at least one active region, wherein the transfer gate has a trench shape of a predetermined depth.
申请公布号 US2006138486(A1) 申请公布日期 2006.06.29
申请号 US20050315149 申请日期 2005.12.23
申请人 LIM KEUN H 发明人 LIM KEUN H.
分类号 H01L31/113 主分类号 H01L31/113
代理机构 代理人
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