| 摘要 |
PROBLEM TO BE SOLVED: To perform darkfield illumination with a simple configuration arranged with a surface light source near a sample. SOLUTION: The illumination apparatus includes the surface light source 12 which emits white light with uniform luminance nearly symmetrically around an optical axis OA from each point of a light emitting surface 12a; a light shielding plate 10 which is formed of a member opaque to the light emitted by the surface light source 12 and shields the light with which the sample 8 is directly irradiated from the surface light source 12; and a cylindrical mirror 11 which reflects a part of the light emitted from the surface light source 12 by a reflecting surface 11a formed on an inner side face and illuminates the sample 8. COPYRIGHT: (C)2006,JPO&NCIPI |
