THIN FILM THICKNESS MEASUREMENT METHOD AND APPARATUS,申请号CA20052591885-传众专利搜索

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发明名称	THIN FILM THICKNESS MEASUREMENT METHOD AND APPARATUS
摘要
申请公布号	CA2591885(A1)	申请公布日期	2006.06.29
申请号	CA20052591885	申请日期	2005.12.19
申请人	HONEYWELL INTERNATIONAL INC.	发明人	HARAN, FRANK M.;JASINSKI, TED W.
分类号	G01B11/06	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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