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发明名称
METHOD FOR FORMING A TUNGSTEN PLUG OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060073141(A)
申请公布日期
2006.06.28
申请号
KR20040112009
申请日期
2004.12.24
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
PARK, TAE HEE
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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