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发明名称
POWDER TRAP APPARATUS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
KR20060072530(A)
申请公布日期
2006.06.28
申请号
KR20040111196
申请日期
2004.12.23
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JUNG NAM
分类号
H01L21/205;H01L21/02
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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