发明名称 |
Enhancement of X-ray reflectometry by measurement of diffuse reflections |
摘要 |
A method for inspection of a sample having a surface layer. The method includes acquiring a first reflectance spectrum of the sample while irradiating the sample with a collimated beam of X-rays, and processing the first reflectance spectrum to measure a diffuse reflection property of the sample. A second reflectance spectrum of the sample is acquired while irradiating the sample with a converging beam of the X-rays. The second reflectance spectrum is analyzed using the diffuse reflection property so as to determine a characteristic of the surface layer of the sample.
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申请公布号 |
US7068753(B2) |
申请公布日期 |
2006.06.27 |
申请号 |
US20040902177 |
申请日期 |
2004.07.30 |
申请人 |
JORDAN VALLEY APPLIED RADIATION LTD. |
发明人 |
BERMAN DAVID;MAZOR ISAAC;YOKHIN BORIS;GVIRTZMAN AMOS |
分类号 |
G01N23/20 |
主分类号 |
G01N23/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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