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发明名称
APPARATUS AND METHOD FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060070119(A)
申请公布日期
2006.06.23
申请号
KR20040108759
申请日期
2004.12.20
申请人
LG.PHILIPS LCD CO., LTD.
发明人
LEE, JAE HYUN
分类号
H01L21/3063
主分类号
H01L21/3063
代理机构
代理人
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