| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic vibration detector, having a simple structure for sure shielding of ultrasonic-wave vibration in an area other than the measuring object area and for accurately detecting only the ultrasonic-wave vibration from the measuring object area, and to provide an ultrasonic-wave bonder that uses the ultrasonic vibration detector. <P>SOLUTION: The non-contact type ultrasonic vibration detector 17 for converting ultrasonic vibration into an electrical signal using a acoustoelectric converting element is provided with an ultrasonic-wave shielding member 19 including an ultrasonic-wave guide hole 20 at the front surface position of an ultrasonic-wave receiving surface 18a of a piezoelectric element 18 as the acoustoelectric converting element. Moreover, the external shape of ultrasonic-wave shielding member 20 is formed in the conic shape to be reduced in the diameter thereof, as it goes to the front end side. In addition, an ultrasonic-wave bonder provided with an ultrasonic-wave vibration measuring means for detecting the vibrating state of an ultrasonic-wave horn 1, and a capillary 4 is formed using the ultrasonic-wave vibration detector 17. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
