摘要 |
An electro-acoustic resonator ( 1, 8, 17 ) of the membrane or FBAR type ( 1 ) or the solidly-mounted or SBAR type ( 8 ), with electrodes comprising a single conducting layer or multiple conducting layers, i.e. sandwich construction ( 17 ) with an optimum coupling factor kr and thus an improved filter bandwidth. The optimum coupling factor kr is achieved by the arrangement that the top electrode ( 6, 15, 25 ) is thinner than the bottom electrode ( 4, 13, 23 ). The coupling factor is independent of the resonator's layout defined by the mask.
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