| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for cleaning a metallic vessel, by which a photosensitive composition as a contaminant stuck to the object to be cleaned can be cleaned and easily removed, in which specific equipment such as explosion-proof equipment is not required, the waste cleaning liquid is easily treated and the influence to be exerted on the environment is sufficiently taken into consideration. SOLUTION: This method for cleaning the metallic vessel comprises the step of removing the photosensitive composition stuck to the metallic vessel by carrying out ultrasonic cleaning of the metallic vessel while using a semi-aqueous cleaning liquid containing at least diethylene glycol alkyl ether, sodium xylene-sulfonate and sodium silicate. COPYRIGHT: (C)2006,JPO&NCIPI |
