| 摘要 |
PROBLEM TO BE SOLVED: To provide an easy-to-handle protection tool and its using method, a method for manufacturing a liquid drop ejection head capable of preventing intrusion of processing liquid into the space section of a drive mechanism by employing the protection tool, a liquid drop ejection head manufactured through the method, and a liquid drop ejector mounting the liquid drop ejection head. SOLUTION: The protection tool 70 being fixed to a substrate through vacuum suction and protecting the surface of the substrate on the fixing side comprises a protection tool body 71 having a second recess 76 for forming a vacuum holding space between the recess and the surface of the substrate on the fixing side, and an O-ring 74 for holding airtightness of the space by touching the substrate. COPYRIGHT: (C)2006,JPO&NCIPI
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