METHOD FOR MANUFACTURING METAL OXIDE FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a metal oxide film, in which a metal oxide film is obtained by heating a base material at a temperature lower than the temperature for pyrolysis film formation by a spray pyrolysis method. SOLUTION: A metal oxide film is formed on a base material by bringing a base plate, which is heated to a temperature not lower than the temperature for forming a metal oxide film, into contact with a solution for forming a metal oxide film, in which a metal salt or a metal complex is dissolved as a metal source. The solution for forming a metal oxide film contains at least either of an oxidizing agent or a reducing agent. COPYRIGHT: (C)2006,JPO&NCIPI