发明名称 |
METHOD FOR PRODUCING AN ELECTRODE |
摘要 |
The invention relates to a method for producing an electrode (1), which interacts with an active layer (8) of a semiconductor component or dielectric. The working function (Wf) of the electrode (1) is adapted to the position of the energy bands (Ec, Ev) in the layer (8) while taking into account the layer property, particularly the doping of the layer (8). The process is rendered economical by virtue of the fact that a metal/non-metal combination is selected as the electrode material, and the working function (F) is set by varying at least one non-metallic component. |
申请公布号 |
WO2006063958(A2) |
申请公布日期 |
2006.06.22 |
申请号 |
WO2005EP56552 |
申请日期 |
2005.12.07 |
申请人 |
AIXTRON AG;BAUMANN, PETER;LINDNER, JOHANNES;SCHUMACHER, MARCUS |
发明人 |
BAUMANN, PETER;LINDNER, JOHANNES;SCHUMACHER, MARCUS |
分类号 |
H01L29/49;H01L21/28;H01L21/336 |
主分类号 |
H01L29/49 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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