发明名称 METHOD FOR PRODUCING AN ELECTRODE
摘要 The invention relates to a method for producing an electrode (1), which interacts with an active layer (8) of a semiconductor component or dielectric. The working function (Wf) of the electrode (1) is adapted to the position of the energy bands (Ec, Ev) in the layer (8) while taking into account the layer property, particularly the doping of the layer (8). The process is rendered economical by virtue of the fact that a metal/non-metal combination is selected as the electrode material, and the working function (F) is set by varying at least one non-metallic component.
申请公布号 WO2006063958(A2) 申请公布日期 2006.06.22
申请号 WO2005EP56552 申请日期 2005.12.07
申请人 AIXTRON AG;BAUMANN, PETER;LINDNER, JOHANNES;SCHUMACHER, MARCUS 发明人 BAUMANN, PETER;LINDNER, JOHANNES;SCHUMACHER, MARCUS
分类号 H01L29/49;H01L21/28;H01L21/336 主分类号 H01L29/49
代理机构 代理人
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