INSPECTION METHOD AND INSPECTION DEVICE FOR ARRAY SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To highly accurately inspect a capacitor for holding pixel voltage.

SOLUTION: An inspection method for an array substrate of an active matrix display panel includes the steps of; putting a transistor into a non-conductive state after charging the holding capacitor to a first voltage and then putting the transistor into a conductive state after application of the first voltage +ΔV to a data terminal and measuring the amount of charge flowing at this time (S1 and S2); applying a second voltage to the data terminal with the transistor in the non-conductive state and the capacitor at a potential VC and then putting the transistor into the conductive state to measure the amount of charge flowing at this time (S3 and S4); applying a third voltage to the data terminal and then putting the transistor into the conductive state to measure the amount of charge flowing at this time when a voltage applied to the data terminal with the transistor in the non-conductive state is different from the first voltage and the potential of the capacitor is VC (S5 and S6); and calculating a capacity of the capacitor for holding a pixel voltage is calculated (S7).

COPYRIGHT: (C)2006,JPO&NCIPI