| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card capable of removing a conduction failure between an upper part and a lower part of a substrate, and keeping the optimum state of the interval from an inspection object corresponding to deformation of the probe card caused by heat, and having excellent contact stability and excellent maintainability. SOLUTION: This probe card comprises a connection pin 7 having a stopper part 74 abutting on a sub-substrate 3 and the surfaces of a guide base 22, the second contact part 75 to be in elastic contact in the fourth through-hole 29 of the guide base 22, and the third contact part 76 to be in elastic contact in the second through-hole 22, for connecting elastically and detachably the sub-substrate 3, the guide base 22 and a guide 21 together, and a probe 6 having an insertion part 61 to be inserted into the third through-hole 30 of the guide 21, a support part 73 for supporting the insertion part 61 and positioning in the height direction in contact with the guide 21, an arm part 64 extending from the support part 73, and a contact part 65 arranged on the tip side of the arm part 64, to be in contact with an electrode which is the inspection object. COPYRIGHT: (C)2006,JPO&NCIPI
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