发明名称 |
SYSTEM AND METHOD FOR INSPECTING A WORKPIECE SURFACE USING POLARIZATION OF SCATTERED LIGHT |
摘要 |
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece. |
申请公布号 |
WO2006066137(A2) |
申请公布日期 |
2006.06.22 |
申请号 |
WO2005US45784 |
申请日期 |
2005.12.17 |
申请人 |
ADE CORPORATION |
发明人 |
JUDELL, NEIL;KOHL, IAN, THOMAS;GOA, SONGPING;BILLS, RICHARD, EARL |
分类号 |
G01N21/00 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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