发明名称 Process for the electrochemical removal of refractory metals or their alloys and use of a solution for this process
摘要 <p>In a method for electrochemical erosion of refractory metal (or alloy), by connecting a workpiece of refractory metal (or alloy) as anode with a conductive erosion tool as cathode, with an electrolyte located between the anode and cathode, and applying an electrical potential between the the anode and cathode so that current flows through the workpiece, electrolyte and tool and part of the workpiece is removed, the electrolyte is a solution (I) containing a conductivity salt and a base and having a pH of 9-13. An independent claim is included for the use of the solution (I) as electrolyte in a method as above.</p>
申请公布号 EP1672101(A1) 申请公布日期 2006.06.21
申请号 EP20050026427 申请日期 2005.12.03
申请人 FORSCHUNGSZENTRUM KARLSRUHE GMBH 发明人 HOLSTEIN, NILS, DR.;KONYS, JUERGEN, DR.;KRAUSS, WOLFGANG, DR.
分类号 C25F3/08;B23H5/06;B24B37/04;C25F3/26;H01L21/321 主分类号 C25F3/08
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