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发明名称
曝光装置及元件制造方法
摘要
为提供能有效率地校正在投影光学系统所产生之非旋转对称像差成分的曝光装置等。该曝光装置装载有:调整机构(40等),供调整投影光学系统(PL)之动态非旋转对称之光学特性;及调整机构(22等),供调整投影光学系统(PL)之静态非旋转对称之光学特性。又,主控制系统(20),按照与投影光学系统(PL)之像面共轭之面的曝光用光(IL)之截面形状与大小,来使调整投影光学系统之光学特性的调整机构(40等)调整量变更。
申请公布号
TW200619865
申请公布日期
2006.06.16
申请号
TW094129942
申请日期
2005.08.31
申请人
尼康股份有限公司
发明人
上原佑作
分类号
G03F7/20;H01L21/027
主分类号
G03F7/20
代理机构
代理人
林镒珠
主权项
地址
日本
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