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发明名称
组成物及方法
摘要
提供用于多孔有机聚氧化矽薄膜制备之组成物,尤其用于积体电路之制造,也提供这类组成物及薄膜之制法。
申请公布号
TW200619287
申请公布日期
2006.06.16
申请号
TW094130656
申请日期
2005.09.07
申请人
罗门哈斯电子材料有限公司
发明人
波寇普兹;嘉拉夫
分类号
C08J9/26;C08L83/04;H01L21/76
主分类号
C08J9/26
代理机构
代理人
洪武雄;陈昭诚
主权项
地址
美国
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