发明名称 |
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE HAVING HIGH EFFICIENCY |
摘要 |
Provided is a semiconductor light emitting diode having a textured structure formed on a substrate. In a method of manufacturing the semiconductor light emitting diode, a metal layer is formed on the substrate, and a metal oxide layer having holes is formed by anodizing the metal layer. The metal oxide layer itself can be used as a textured structure pattern, or the textured structure pattern can be formed by forming holes in the substrate or a material layer under the metal oxide layer corresponding to the holes of the metal oxide layer. The manufacture of the semiconductor light emitting diode is completed by sequentially forming a first semiconductor layer, an active layer, and a second semiconductor layer on the textured structure pattern. |
申请公布号 |
KR20060064306(A) |
申请公布日期 |
2006.06.13 |
申请号 |
KR20040103113 |
申请日期 |
2004.12.08 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
LEE, JEONG WOOK;SUNG, YOUN JOON |
分类号 |
H01L33/06;H01L33/10;H01L33/22;H01L33/32 |
主分类号 |
H01L33/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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