发明名称 |
Heat treatment system and a method for cooling a loading chamber |
摘要 |
A heat treatment system and method for cooling a loading chamber that includes a heat treatment furnace for heat-treating an object to be treated. The heat treatment furnace includes a throat for carrying the object in and out, and a cooling mechanism for cooling the vicinity of the throat. The cooling mechanism has a ventilating unit with a ventilating port for sending a cooling fluid toward the vicinity of the throat and a heat exchanger arranged so as to face the ventilating port in the vicinity of the throat. The cooling mechanism also has an intake fan for sucking the cooling fluid in the vicinity of the throat over the heat exchanger. When the object to be treated is carried in, the structure of various mechanisms in the vicinity of the throat is simplified, and space is saved.
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申请公布号 |
US7059849(B2) |
申请公布日期 |
2006.06.13 |
申请号 |
US20010934756 |
申请日期 |
2001.08.23 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
SAKATA KAZUNARI;HASEGAWA KOYU;KATABUCHI KEIICHI;WATANABE SHINGO;MOCHIZUKI SHINYA;AKIMOTO MOTOKI;MOTONO HIROSHI |
分类号 |
F27D9/00;H01L21/324;H01L21/00;H01L21/673;H01L21/677 |
主分类号 |
F27D9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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