发明名称 LASER IRRADIATING SYSTEM
摘要 <p>A laser irradiation system includes a laser configured to irradiate light, a laser transfer unit configured to transfer the laser along a target irradiation area, the target irradiation area being divided into a plurality of sections, a laser transfer controller configured to control a speed of the laser in each of the plurality of sections of the target irradiation area, a laser output controller configured to control an output level of the laser in each of the plurality of sections of the target irradiation area, and a main controller configured to control the laser output controller and the laser transfer controller.</p>
申请公布号 KR101084272(B1) 申请公布日期 2011.11.16
申请号 KR20090094382 申请日期 2009.10.05
申请人 发明人
分类号 H01L51/56;H05B33/04 主分类号 H01L51/56
代理机构 代理人
主权项
地址