发明名称 Method and a device for the combination of a first and second beam of rays
摘要 A method for combining a first and a second ray bundle includes forming a first partial beam and a second partial beam by the first ray bundle interacting with a first beam-splitter layer, and forming a third partial beam and a fourth partial beam by the second ray bundle interacting with the first beam-splitter layer. The first, second, third and fourth partial beams are superimposed into an outgoing ray bundle by the first, second, third and fourth partial beams interacting with a second beam-splitter layer so that, in the outgoing ray bundle, the number of occurring reflections and transmissions of the first and second partial beams are basically the same as the number of occurring reflections and transmissions of the third and fourth partial beams.
申请公布号 US7061683(B2) 申请公布日期 2006.06.13
申请号 US20040491457 申请日期 2004.04.01
申请人 LEICA MICROSYSTEMS WETZLAR GMBH 发明人 KRUEGER RALF
分类号 G01B11/24;G02B27/14;G02B5/04;G02B21/18;G02B27/10 主分类号 G01B11/24
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