Process for producing semiconductor substrates and semiconductor substrates,申请号KR20020055256-传众专利搜索

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发明名称	Process for producing semiconductor substrates and semiconductor substrates
摘要
申请公布号	KR100588833(B1)	申请公布日期	2006.06.13
申请号	KR20020055256	申请日期	2002.09.12
申请人		发明人
分类号	H01L21/768;C23C18/12;H01L21/00;H01L21/306;H01L21/31;H01L21/3105;H01L21/312;H01L21/316	主分类号	H01L21/768
代理机构		代理人
主权项
地址

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