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发明名称
METHOD FOR MANUFACTURING LOWER CONTACT OF CAPACITOR IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060062530(A)
申请公布日期
2006.06.12
申请号
KR20040101395
申请日期
2004.12.03
申请人
HYNIX SEMICONDUCTOR INC.
发明人
KIM, YOUNG DAE;LEE, EUN A;CHAE, SU JIN;CHANG, JUN SOO;LEE, KEUM BUM;CHO, HO JIN
分类号
H01L21/8242
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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