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发明名称
APPARATUS AND METHOD FOR TESTING ELECTRICAL CHARACTERIZATION OF SEMICONDUCTOR WORKPIECE
摘要
申请公布号
KR20060063382(A)
申请公布日期
2006.06.12
申请号
KR20040102545
申请日期
2004.12.07
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
YUN, BYONG HUI
分类号
G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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