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发明名称
Bottom antireflective coatings
摘要
The present invention relates to bottom antireflective coating compositions and polymers useful in making such compositions.
申请公布号
WO2005052016(B1)
申请公布日期
2006.06.08
申请号
WO2004IB04412
申请日期
2004.11.13
申请人
AZ ELECTRONIC MATERIALS USA CORP.;YAO, HUIRONG;DING-LEE, SHUJI;WU, HENGPENG;XIANG, ZHONG
发明人
YAO, HUIRONG;DING-LEE, SHUJI;WU, HENGPENG;XIANG, ZHONG
分类号
C07C231/08;C07D207/404;C08F8/30;C08F220/36;C08F220/58;C09D133/14;C09D133/24;G03F7/09
主分类号
C07C231/08
代理机构
代理人
主权项
地址
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