ion implanting apparatus,申请号KR19990054173-传众专利搜索

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发明名称	ion implanting apparatus
摘要
申请公布号	KR100587665(B1)	申请公布日期	2006.06.08
申请号	KR19990054173	申请日期	1999.12.01
申请人		发明人
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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